Depth profile determination with confidence intervals from Rutherford backscattering data

Rutherford Backscattering Spectrometry (RBS)

Rutherford Backscattering Spectrometry (RBS) is a widely used method for the surface layer analysis of solids. This lecture gives a brief introduction into the method, and describes scattering kinematics, scattering cross-section data, stopping power data, detector resolution issues, and electronic energy loss straggling in some detail. Computer codes for the simulation of RBS spectra and RBS d...

Neural network analysis of Rutherford backscattering data

A neural network algorithm dedicated to recognition of Rutherford backscattering (RBS) data was developed. The algorithm was applied to one important particular case, namely the determination of the amount of Ge implanted in Si samples and the depth at which the Ge is located. An average error on both Ge amount and depth of less than 3% could be reached on generated spectra. We then applied the...

Detection of hydrogen by electron Rutherford backscattering.

A novel method for detection of hydrogen by an electron beam in extremely thin samples is described. Elastically scattered electrons impinging with 20-30 keV on a thin formvar film were detected at a scattering angle near 45 degrees. In these large momentum transfer elastic collisions a clear separation of the signal of hydrogen and heavier elements was found. By changing the momentum transfer ...

Automatic Iterative Fitting of Rutherford Backscattering Spectra from Multielement Samples

A computer code (BASF) has been constructed to perform automatic iterative fitting of Rutherford backscattering spectra using only the experimental spectrum and the parameter set defining the experiment. The code may be used to analyze samples containing anywhere from two to five elements. The code output consists of the total amount of each element present and a composition versus depth profil...

Building Central Confidence Intervals with the Profile Construction Method